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Polishing Characteristics of ELID-Ground Surface of Nano Precision Optical Elements
Polishing Characteristics of ELID-Ground Surface of Nano Precision Optical Elements
Polishing Characteristics of ELID-Ground Surface of Nano Precision Optical Elements
Lin, W. (author) / Ohmori, H. (author) / Suzuki, T. (author) / Uehara, Y. (author) / Morita, S. (author) / Tamaki, J. / Kuriyagawa, T. / Baron, Y. M.
2005-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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