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    Properties of Ta–Mo alloy gate electrode for n-MOSFET

    New search for: Lee, C. K.
    New search for: Kim, J. Y.
    New search for: Hong, S. N.
    New search for: Zhong, H.
    New search for: Chen, B.
    New search for: Misra, V.

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    Properties of Ta–Mo alloy gate electrode for n-MOSFET

    New search for: Lee, C. K.
    New search for: Kim, J. Y.
    New search for: Hong, S. N.
    New search for: Zhong, H.
    New search for: Chen, B.
    New search for: Misra, V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Properties of Ta–Mo alloy gate electrode for n-MOSFET

    New search for: Lee, C. K.
    New search for: Kim, J. Y.
    New search for: Hong, S. N.
    New search for: Zhong, H.
    New search for: Chen, B.
    New search for: Misra, V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Properties of Ta–Mo alloy gate electrode for n-MOSFET

    Contributors:

    Lee, C. K. (author) / Kim, J. Y. (author) / Hong, S. N. (author) / Zhong, H. (author) / Chen, B. (author) / Misra, V. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE ; 40 ; 2693-2695

    Publication date:

    2005-01-01

    Size:

    3 pages

    ISSN:

    0022-2461

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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