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Properties of Ta–Mo alloy gate electrode for n-MOSFET
Properties of Ta–Mo alloy gate electrode for n-MOSFET
Properties of Ta–Mo alloy gate electrode for n-MOSFET
Lee, C. K. (Autor:in) / Kim, J. Y. (Autor:in) / Hong, S. N. (Autor:in) / Zhong, H. (Autor:in) / Chen, B. (Autor:in) / Misra, V. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 40 ; 2693-2695
01.01.2005
3 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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