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A platform for research: civil engineering, architecture and urbanism
Near-field optical lithography method for fabrication of the nanodimensional objects
Near-field optical lithography method for fabrication of the nanodimensional objects
Near-field optical lithography method for fabrication of the nanodimensional objects
Dryakhlushin, V. F. (author) / Klimov, A. Y. (author) / Rogov, V. V. (author) / Vostokov, N. V. (author)
APPLIED SURFACE SCIENCE ; 248 ; 200-203
2005-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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