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Near-field optical lithography method for fabrication of the nanodimensional objects
Near-field optical lithography method for fabrication of the nanodimensional objects
Near-field optical lithography method for fabrication of the nanodimensional objects
Dryakhlushin, V. F. (Autor:in) / Klimov, A. Y. (Autor:in) / Rogov, V. V. (Autor:in) / Vostokov, N. V. (Autor:in)
APPLIED SURFACE SCIENCE ; 248 ; 200-203
01.01.2005
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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