Thermal degradation behavior of indium tin oxide thin films deposited by radio frequency magnetron sputtering: Fid-Bau Portal

Thermal degradation behavior of indium tin oxide thin films deposited by radio frequency magnetron sputtering

Kim, Y.-N. / Shin, H.-G. / Song, J.-K. / Cho, D.-H. / Lee, H.-S. / Jung, Y.-G.

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Thermal degradation behavior of indium tin oxide thin films deposited by radio frequency magnetron sputtering

Kim, Y.-N. / Shin, H.-G. / Song, J.-K. / Cho, D.-H. / Lee, H.-S. / Jung, Y.-G.

Thermal degradation behavior of indium tin oxide thin films deposited by radio frequency magnetron sputtering

Kim, Y.-N. / Shin, H.-G. / Song, J.-K. / Cho, D.-H. / Lee, H.-S. / Jung, Y.-G.

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Check availability in my library

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Document information

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Document information

Title:

Thermal degradation behavior of indium tin oxide thin films deposited by radio frequency magnetron sputtering

Contributors:

Kim, Y.-N. (author) / Shin, H.-G. (author) / Song, J.-K. (author) / Cho, D.-H. (author) / Lee, H.-S. (author) / Jung, Y.-G. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 20 ; 1574-1579

Publication date:

2005-01-01

Size:

6 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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