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Preparation and properties of erbium oxide films deposited by radio frequency magnetron sputtering
Preparation and properties of erbium oxide films deposited by radio frequency magnetron sputtering
Preparation and properties of erbium oxide films deposited by radio frequency magnetron sputtering
APPLIED SURFACE SCIENCE ; 307 ; 615-620
2014-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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