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Use of Fiber Interferometer for AFM Cantilever Probe Displacement Control

Shie, N. C. / Chen, T. L. / Cheng, K. Y.

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Use of Fiber Interferometer for AFM Cantilever Probe Displacement Control

Shie, N. C. / Chen, T. L. / Cheng, K. Y.

Use of Fiber Interferometer for AFM Cantilever Probe Displacement Control

Shie, N. C. / Chen, T. L. / Cheng, K. Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Use of Fiber Interferometer for AFM Cantilever Probe Displacement Control

Contributors:

Shie, N. C. (author) / Chen, T. L. (author) / Cheng, K. Y. (author) / Gao, Y. / Tse, S. / Gao, W.

Published in:

Measurement Technology and Intelligent Instruments VI ; 77-82

KEY ENGINEERING MATERIALS ; 295/296

Publication date:

2005-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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