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    Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer

    New search for: Chen, C. J.
    New search for: Pan, S. P.
    New search for: Chang, L. C.
    New search for: Gao, Y.
    New search for: Tse, S.
    New search for: Gao, W.

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    Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer

    New search for: Chen, C. J.
    New search for: Pan, S. P.
    New search for: Chang, L. C.
    New search for: Gao, Y.
    New search for: Tse, S.
    New search for: Gao, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer

    New search for: Chen, C. J.
    New search for: Pan, S. P.
    New search for: Chang, L. C.
    New search for: Gao, Y.
    New search for: Tse, S.
    New search for: Gao, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer

    Contributors:

    Chen, C. J. (author) / Pan, S. P. (author) / Chang, L. C. (author) / Gao, Y. / Tse, S. / Gao, W.

    Published in:

    Measurement Technology and Intelligent Instruments VI ; 89-94

    KEY ENGINEERING MATERIALS ; 295/296

    Publication date:

    2005-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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