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A Measurement System for Step Imprint Lithography

Liu, H. Z. / Lu, B. H. / Ding, Y. C. / Li, D. C. / Tang, Y. P. / Jin, T.

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A Measurement System for Step Imprint Lithography

Liu, H. Z. / Lu, B. H. / Ding, Y. C. / Li, D. C. / Tang, Y. P. / Jin, T.

A Measurement System for Step Imprint Lithography

Liu, H. Z. / Lu, B. H. / Ding, Y. C. / Li, D. C. / Tang, Y. P. / Jin, T.

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Check availability in my library

Order at Subito €

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Document information

Title:

A Measurement System for Step Imprint Lithography

Contributors:

Liu, H. Z. (author) / Lu, B. H. (author) / Ding, Y. C. (author) / Li, D. C. (author) / Tang, Y. P. (author) / Jin, T. (author) / Gao, Y. / Tse, S. / Gao, W.

Published in:

Measurement Technology and Intelligent Instruments VI ; 107-112

KEY ENGINEERING MATERIALS ; 295/296

Publication date:

2005-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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