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Excimer laser modification of thin AlN films

Georgiev, D. G. / Rosenberger, L. W. / Danylyuk, Y. V. / Baird, R. J. / Newaz, G. / Shreve, G. / Auner, G.

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Excimer laser modification of thin AlN films

Georgiev, D. G. / Rosenberger, L. W. / Danylyuk, Y. V. / Baird, R. J. / Newaz, G. / Shreve, G. / Auner, G.

Excimer laser modification of thin AlN films

Georgiev, D. G. / Rosenberger, L. W. / Danylyuk, Y. V. / Baird, R. J. / Newaz, G. / Shreve, G. / Auner, G.

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Check availability in my library

Order at Subito €

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Document information

Title:

Excimer laser modification of thin AlN films

Contributors:

Georgiev, D. G. (author) / Rosenberger, L. W. (author) / Danylyuk, Y. V. (author) / Baird, R. J. (author) / Newaz, G. (author) / Shreve, G. (author) / Auner, G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 249 ; 45-53

Publication date:

2005-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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