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Excimer laser reactive deposition of vanadium nitride thin films

D`Anna, E. / Di Cristoforo, A. / Fernandez, M. / Leggieri, G. / Luches, A. / Majni, G. / Mengucci, P. / Nanai, L.

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Excimer laser reactive deposition of vanadium nitride thin films

D`Anna, E. / Di Cristoforo, A. / Fernandez, M. / Leggieri, G. / Luches, A. / Majni, G. / Mengucci, P. / Nanai, L.

Excimer laser reactive deposition of vanadium nitride thin films

D`Anna, E. / Di Cristoforo, A. / Fernandez, M. / Leggieri, G. / Luches, A. / Majni, G. / Mengucci, P. / Nanai, L.

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Check availability in my library

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Document information

Title:

Excimer laser reactive deposition of vanadium nitride thin films

Contributors:

D`Anna, E. (author) / Di Cristoforo, A. (author) / Fernandez, M. (author) / Leggieri, G. (author) / Luches, A. (author) / Majni, G. (author) / Mengucci, P. (author) / Nanai, L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 186 ; 496-501

Publication date:

2002-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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