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Simulation of growth process of thin film on non-planar substrate

Qi, H. J. / Shao, J. D. / Zhang, D. P. / Yi, K. / Fan, Z. X.

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Simulation of growth process of thin film on non-planar substrate

Qi, H. J. / Shao, J. D. / Zhang, D. P. / Yi, K. / Fan, Z. X.

Simulation of growth process of thin film on non-planar substrate

Qi, H. J. / Shao, J. D. / Zhang, D. P. / Yi, K. / Fan, Z. X.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Simulation of growth process of thin film on non-planar substrate

Contributors:

Qi, H. J. (author) / Shao, J. D. (author) / Zhang, D. P. (author) / Yi, K. (author) / Fan, Z. X. (author)

Published in:

APPLIED SURFACE SCIENCE ; 249 ; 85-90

Publication date:

2005-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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