XPS characterization of surface and interfacial structure of sputtered TiNi films on Si substrate: Fid-Bau Portal

XPS characterization of surface and interfacial structure of sputtered TiNi films on Si substrate

Fu, Y. / Du, H. / Zhang, S. / Huang, W.

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XPS characterization of surface and interfacial structure of sputtered TiNi films on Si substrate

Fu, Y. / Du, H. / Zhang, S. / Huang, W.

XPS characterization of surface and interfacial structure of sputtered TiNi films on Si substrate

Fu, Y. / Du, H. / Zhang, S. / Huang, W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

XPS characterization of surface and interfacial structure of sputtered TiNi films on Si substrate

Contributors:

Fu, Y. (author) / Du, H. (author) / Zhang, S. (author) / Huang, W. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING A ; 403 ; 25-31

Publication date:

2005-01-01

Size:

7 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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