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Wear behavior of DC unbalanced magnetron sputter deposited ZrCN films

Yao, S. H. / Su, Y. L. / Kao, W. H. / Cheng, K. W.

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Wear behavior of DC unbalanced magnetron sputter deposited ZrCN films

Yao, S. H. / Su, Y. L. / Kao, W. H. / Cheng, K. W.

Wear behavior of DC unbalanced magnetron sputter deposited ZrCN films

Yao, S. H. / Su, Y. L. / Kao, W. H. / Cheng, K. W.

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Check availability in my library

Order at Subito €

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Document information

Title:

Wear behavior of DC unbalanced magnetron sputter deposited ZrCN films

Contributors:

Yao, S. H. (author) / Su, Y. L. (author) / Kao, W. H. (author) / Cheng, K. W. (author)

Published in:

MATERIALS LETTERS ; 59 ; 3230-3233

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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