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Studies on structural and electrical properties of silicon nitride films deposited by unbalanced magnetron sputter deposition

Patra, S. K. / Rao, G. M.

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Studies on structural and electrical properties of silicon nitride films deposited by unbalanced magnetron sputter deposition

Patra, S. K. / Rao, G. M.

Studies on structural and electrical properties of silicon nitride films deposited by unbalanced magnetron sputter deposition

Patra, S. K. / Rao, G. M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Studies on structural and electrical properties of silicon nitride films deposited by unbalanced magnetron sputter deposition

Contributors:

Patra, S. K. (author) / Rao, G. M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 90 ; 90 - 98

Publication date:

2002-01-01

Size:

9 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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