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Surface characterisation and interface studies of high-k materials by XPS and TOF-SIMS

Besmehn, A. / Scholl, A. / Rije, E. / Breuer, U.

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Surface characterisation and interface studies of high-k materials by XPS and TOF-SIMS

Besmehn, A. / Scholl, A. / Rije, E. / Breuer, U.

Surface characterisation and interface studies of high-k materials by XPS and TOF-SIMS

Besmehn, A. / Scholl, A. / Rije, E. / Breuer, U.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Surface characterisation and interface studies of high-k materials by XPS and TOF-SIMS

Contributors:

Besmehn, A. (author) / Scholl, A. (author) / Rije, E. (author) / Breuer, U. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 172-176

Publication date:

2005-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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