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Trapped Particle Detection in Bonded Semiconductors Using Gray-field Photoelastic Imaging
Trapped Particle Detection in Bonded Semiconductors Using Gray-field Photoelastic Imaging
Trapped Particle Detection in Bonded Semiconductors Using Gray-field Photoelastic Imaging
Horn, G. (author) / Mackin, T. J. (author) / Lesniak, J. (author)
EXPERIMENTAL MECHANICS ; 45 ; 457-466
2005-01-01
10 pages
Article (Journal)
English
DDC:
620.1
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