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A compensation of Young's modulus in polysilicon structure with discontinuous material distribution

Lee, D. c. / Choi, H. s. / Han, C. s. / Jeong, H. j.

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A compensation of Young's modulus in polysilicon structure with discontinuous material distribution

Lee, D. c. / Choi, H. s. / Han, C. s. / Jeong, H. j.

A compensation of Young's modulus in polysilicon structure with discontinuous material distribution

Lee, D. c. / Choi, H. s. / Han, C. s. / Jeong, H. j.

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Check availability in my library

Order at Subito €

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Document information

Title:

A compensation of Young's modulus in polysilicon structure with discontinuous material distribution

Contributors:

Lee, D. c. (author) / Choi, H. s. (author) / Han, C. s. (author) / Jeong, H. j. (author)

Published in:

MATERIALS LETTERS ; 59 ; 3900-3903

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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