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    Scanning capacitance microscopy two-dimensional carrier profiling for ultra-shallow junction characterization in deep submicron technology

    New search for: Giannazzo, F.
    New search for: Raineri, V.
    New search for: Mirabella, S.
    New search for: Bruno, E.
    New search for: Impellizzeri, G.
    New search for: Priolo, F.

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    Scanning capacitance microscopy two-dimensional carrier profiling for ultra-shallow junction characterization in deep submicron technology

    New search for: Giannazzo, F.
    New search for: Raineri, V.
    New search for: Mirabella, S.
    New search for: Bruno, E.
    New search for: Impellizzeri, G.
    New search for: Priolo, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Scanning capacitance microscopy two-dimensional carrier profiling for ultra-shallow junction characterization in deep submicron technology

    New search for: Giannazzo, F.
    New search for: Raineri, V.
    New search for: Mirabella, S.
    New search for: Bruno, E.
    New search for: Impellizzeri, G.
    New search for: Priolo, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Scanning capacitance microscopy two-dimensional carrier profiling for ultra-shallow junction characterization in deep submicron technology

    Contributors:

    Giannazzo, F. (author) / Raineri, V. (author) / Mirabella, S. (author) / Bruno, E. (author) / Impellizzeri, G. (author) / Priolo, F. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 54-61

    Publication date:

    2005-01-01

    Size:

    8 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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