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    Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies

    New search for: Eyben, P.
    New search for: Janssens, T.
    New search for: Vandervorst, W.

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    Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies

    New search for: Eyben, P.
    New search for: Janssens, T.
    New search for: Vandervorst, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies

    New search for: Eyben, P.
    New search for: Janssens, T.
    New search for: Vandervorst, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies

    Contributors:

    Eyben, P. (author) / Janssens, T. (author) / Vandervorst, W. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 45-53

    Publication date:

    2005-01-01

    Size:

    9 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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