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Suppression of boron interstitial clusters in SOI using vacancy engineering

Smith, A. J. / Colombeau, B. / Gwilliam, R. / Cowern, N. E. / Sealy, B. J. / Milosavljevic, M. / Collart, E. / Gennaro, S. / Bersani, M. / Barozzi, M.

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Suppression of boron interstitial clusters in SOI using vacancy engineering

Smith, A. J. / Colombeau, B. / Gwilliam, R. / Cowern, N. E. / Sealy, B. J. / Milosavljevic, M. / Collart, E. / Gennaro, S. / Bersani, M. / Barozzi, M.

Suppression of boron interstitial clusters in SOI using vacancy engineering

Smith, A. J. / Colombeau, B. / Gwilliam, R. / Cowern, N. E. / Sealy, B. J. / Milosavljevic, M. / Collart, E. / Gennaro, S. / Bersani, M. / Barozzi, M.

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Title:

Suppression of boron interstitial clusters in SOI using vacancy engineering

Contributors:

Smith, A. J. (author) / Colombeau, B. (author) / Gwilliam, R. (author) / Cowern, N. E. (author) / Sealy, B. J. (author) / Milosavljevic, M. (author) / Collart, E. (author) / Gennaro, S. (author) / Bersani, M. (author) / Barozzi, M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 210-214

Publication date:

2005-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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