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Porous silicon damage enhanced phosphorus and aluminium gettering of p-type Czochralski silicon

Hassen, M. / Ben Jaballah, A. / Hajji, M. / Rahmouni, H. / Selmi, A. / Ezzaouia, H.

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Porous silicon damage enhanced phosphorus and aluminium gettering of p-type Czochralski silicon

Hassen, M. / Ben Jaballah, A. / Hajji, M. / Rahmouni, H. / Selmi, A. / Ezzaouia, H.

Porous silicon damage enhanced phosphorus and aluminium gettering of p-type Czochralski silicon

Hassen, M. / Ben Jaballah, A. / Hajji, M. / Rahmouni, H. / Selmi, A. / Ezzaouia, H.

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Document information

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Document information

Title:

Porous silicon damage enhanced phosphorus and aluminium gettering of p-type Czochralski silicon

Contributors:

Hassen, M. (author) / Ben Jaballah, A. (author) / Hajji, M. (author) / Rahmouni, H. (author) / Selmi, A. (author) / Ezzaouia, H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 297-300

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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