The hydrogen gettering at post-implantation hydrogen plasma treatments of helium- and hydrogen implanted Czochralski silicon: Fid-Bau Portal

The hydrogen gettering at post-implantation hydrogen plasma treatments of helium- and hydrogen implanted Czochralski silicon

Ulyashin, A. G. / Ivanov, A. I. / Job, R. / Fahrner, W. R. / Frantskevich, A. V. / Komarov, F. F. / Kamyshan, A. C.

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The hydrogen gettering at post-implantation hydrogen plasma treatments of helium- and hydrogen implanted Czochralski silicon

Ulyashin, A. G. / Ivanov, A. I. / Job, R. / Fahrner, W. R. / Frantskevich, A. V. / Komarov, F. F. / Kamyshan, A. C.

The hydrogen gettering at post-implantation hydrogen plasma treatments of helium- and hydrogen implanted Czochralski silicon

Ulyashin, A. G. / Ivanov, A. I. / Job, R. / Fahrner, W. R. / Frantskevich, A. V. / Komarov, F. F. / Kamyshan, A. C.

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Title:

The hydrogen gettering at post-implantation hydrogen plasma treatments of helium- and hydrogen implanted Czochralski silicon

Contributors:

Ulyashin, A. G. (author) / Ivanov, A. I. (author) / Job, R. (author) / Fahrner, W. R. (author) / Frantskevich, A. V. (author) / Komarov, F. F. (author) / Kamyshan, A. C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 73 ; 64 - 68

Publication date:

2000-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ulyashin, A. G. / Ivanov, A. I. / Khorunzhii, I. A. et al. | British Library Online Contents | 1999

The evolution of hydrogen molecule formation in hydrogen-plasma-treated Czochralski silicon

Job, R. / Ulyashin, A. G. / Fahrner, W. R. | British Library Online Contents | 2001

Low-temperature photoluminescence characterization of hydrogen- and helium-implanted silicon

Ulyashin, A. G. / Job, R. / Fahrner, W. R. et al. | British Library Online Contents | 2001

Out-diffusion of hydrogen from hydrogen plasma-processed oxygen-implanted silicon

Misiuk, A. / Bak-Misiuk, J. / Barcz, A. et al. | British Library Online Contents | 2012

Ultradense gas bubbles in hydrogen- or helium-implanted (or coimplanted) silicon

Cerofolini, G.F. / Calzolari, G. / Corni, F. et al. | British Library Online Contents | 2000