Crystallization kinetics of amorphous SiC films: Influence of substrate: Fid-Bau Portal

Crystallization kinetics of amorphous SiC films: Influence of substrate

Schmidt, H. / Fotsing, E. R. / Borchardt, G. / Chassagnon, R. / Chevalier, S. / Bruns, M.

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Crystallization kinetics of amorphous SiC films: Influence of substrate

Schmidt, H. / Fotsing, E. R. / Borchardt, G. / Chassagnon, R. / Chevalier, S. / Bruns, M.

Crystallization kinetics of amorphous SiC films: Influence of substrate

Schmidt, H. / Fotsing, E. R. / Borchardt, G. / Chassagnon, R. / Chevalier, S. / Bruns, M.

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Document information

Title:

Crystallization kinetics of amorphous SiC films: Influence of substrate

Contributors:

Schmidt, H. (author) / Fotsing, E. R. (author) / Borchardt, G. (author) / Chassagnon, R. (author) / Chevalier, S. (author) / Bruns, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 1460-1470

Publication date:

2005-01-01

Size:

11 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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