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Nitrogen effects on crystallization kinetics of amorphous TiO~xN~y thin films

Hukari, K. / Dannenberg, R. / Stach, E. A.

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Nitrogen effects on crystallization kinetics of amorphous TiO~xN~y thin films

Hukari, K. / Dannenberg, R. / Stach, E. A.

Nitrogen effects on crystallization kinetics of amorphous TiO~xN~y thin films

Hukari, K. / Dannenberg, R. / Stach, E. A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Nitrogen effects on crystallization kinetics of amorphous TiO~xN~y thin films

Contributors:

Hukari, K. (author) / Dannenberg, R. (author) / Stach, E. A. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 17 ; 550-555

Publication date:

2002-01-01

Size:

6 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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