Fabrication of self-ordered nanohole arrays on Si by localized anodization and subsequent chemical etching: Fid-Bau Portal

Fabrication of self-ordered nanohole arrays on Si by localized anodization and subsequent chemical etching

Asoh, H. / Oide, A. / Ono, S.

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Fabrication of self-ordered nanohole arrays on Si by localized anodization and subsequent chemical etching

Asoh, H. / Oide, A. / Ono, S.

Fabrication of self-ordered nanohole arrays on Si by localized anodization and subsequent chemical etching

Asoh, H. / Oide, A. / Ono, S.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of self-ordered nanohole arrays on Si by localized anodization and subsequent chemical etching

Contributors:

Asoh, H. (author) / Oide, A. (author) / Ono, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 1668-1673

Publication date:

2005-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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