Fabrication of size-tunable, periodic Si nanohole arrays by plasma modified nanosphere lithography and anisotropic wet etching: Fid-Bau Portal

Fabrication of size-tunable, periodic Si nanohole arrays by plasma modified nanosphere lithography and anisotropic wet etching

Cheng, S. L. / Lin, Y. H. / Lee, S. W. / Lee, T. / Chen, H. / Hu, J. C. / Chen, L. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Fabrication of size-tunable, periodic Si nanohole arrays by plasma modified nanosphere lithography and anisotropic wet etching

Cheng, S. L. / Lin, Y. H. / Lee, S. W. / Lee, T. / Chen, H. / Hu, J. C. / Chen, L. T.

Fabrication of size-tunable, periodic Si nanohole arrays by plasma modified nanosphere lithography and anisotropic wet etching

Cheng, S. L. / Lin, Y. H. / Lee, S. W. / Lee, T. / Chen, H. / Hu, J. C. / Chen, L. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Fabrication of size-tunable, periodic Si nanohole arrays by plasma modified nanosphere lithography and anisotropic wet etching

Contributors:

Cheng, S. L. (author) / Lin, Y. H. (author) / Lee, S. W. (author) / Lee, T. (author) / Chen, H. (author) / Hu, J. C. (author) / Chen, L. T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 263 ; 430-435

Publication date:

2012-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Li, W. / Xu, L. / Zhao, W. M. et al. | British Library Online Contents | 2007

Extending nanosphere lithography for the fabrication of periodic arrays of subwavelength metallic nanoholes

Canpean, V. / Astilean, S. | British Library Online Contents | 2009

Novel 2D periodic arrays of carbon microholes by nanosphere lithography

Xiao, Z. Y. / An, Q. D. / Zhai, S. R. et al. | British Library Online Contents | 2013

Fabrication of self-ordered nanohole arrays on Si by localized anodization and subsequent chemical etching

Asoh, H. / Oide, A. / Ono, S. | British Library Online Contents | 2005

Growth of periodic carbon nanotube structures using nanosphere lithography

Man, Yuhong / Chen, Zhiqian / Zhang, Yongping et al. | British Library Online Contents | 2015