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Investigation of carbon plasma species emission at relatively high KrF laser fluences in nitrogen ambient
Investigation of carbon plasma species emission at relatively high KrF laser fluences in nitrogen ambient
Investigation of carbon plasma species emission at relatively high KrF laser fluences in nitrogen ambient
Abdelli-Messaci, S. (author) / Kerdja, T. (author) / Bendib, A. (author) / Aberkane, S. M. (author) / Lafane, S. (author) / Malek, S. (author)
APPLIED SURFACE SCIENCE ; 252 ; 2012-2020
2005-01-01
9 pages
Article (Journal)
English
DDC:
621.35
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