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    Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

    New search for: Liu, Y.
    New search for: Li, L.
    New search for: Xu, M.
    New search for: Cai, X.
    New search for: Chen, Q.
    New search for: Hu, Y.
    New search for: Chu, P. K.

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    Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

    New search for: Liu, Y.
    New search for: Li, L.
    New search for: Xu, M.
    New search for: Cai, X.
    New search for: Chen, Q.
    New search for: Hu, Y.
    New search for: Chu, P. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

    New search for: Liu, Y.
    New search for: Li, L.
    New search for: Xu, M.
    New search for: Cai, X.
    New search for: Chen, Q.
    New search for: Hu, Y.
    New search for: Chu, P. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Effects of nitrogen ion implantation and implantation energy on surface properties and adhesion strength of TiN films deposited on aluminum by magnetron sputtering

    Contributors:

    Liu, Y. (author) / Li, L. (author) / Xu, M. (author) / Cai, X. (author) / Chen, Q. (author) / Hu, Y. (author) / Chu, P. K. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING A ; 415 ; 140-144

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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