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Nanopatterning with UV Optical Lithography
Nanopatterning with UV Optical Lithography
Nanopatterning with UV Optical Lithography
Rothschild, M. (author) / Bloomstein, T. M. (author) / Efremow, N. (author) / Fedynyshyn, T. H. (author) / Fritze, M. (author) / Pottebaum, I. (author) / Switkes, M. (author)
MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 30 ; 942-946
2005-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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