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    A Study on the Fabrication of Micro Groove on Si Wafer using Chemical Mechanical Machining

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    New search for: Jeong, H.

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    A Study on the Fabrication of Micro Groove on Si Wafer using Chemical Mechanical Machining

    New search for: Park, J.
    New search for: Jeong, H.

    Access

    Access via TIB
    Check availability in my library
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    A Study on the Fabrication of Micro Groove on Si Wafer using Chemical Mechanical Machining

    New search for: Park, J.
    New search for: Jeong, H.

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    A Study on the Fabrication of Micro Groove on Si Wafer using Chemical Mechanical Machining

    Contributors:

    Park, J. (author) / Jeong, H. (author)

    Published in:

    JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY ; 19 ; 2096-2104

    Publication date:

    2005-01-01

    Size:

    9 pages

    ISSN:

    1738-494X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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