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Nanometrology - Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes
Nanometrology - Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes
Nanometrology - Nanopositioning- and Nanomeasuring Machine with Integrated Nanopobes
Jager, G. (author) / Hausotte, T. (author) / Manske, E. (author) / Buchner, H. J. (author) / Mastylo, R. (author) / Dorozhovets, N. (author) / Fussl, R. (author) / Grunwald, R. (author) / Jywe, W. / Chen, C.-L.
2006-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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