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Traceable Nanometrology Realized by Means of Nanopositioning and Nanomeasuring Machine
Traceable Nanometrology Realized by Means of Nanopositioning and Nanomeasuring Machine
Traceable Nanometrology Realized by Means of Nanopositioning and Nanomeasuring Machine
Jager, G. (author) / Manske, E. (author) / Hausotte, T. (author) / Mastylo, R. (author) / Dorozhovets, N. (author) / Hofmann, N. (author) / Gao, W. / Takaya, Y. / Gao, Y. / Krystek, M.
2008-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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