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Preparation and characterization of pulsed laser deposition (PLD) SiC films

Tang, Y. H. / Sham, T. K. / Yang, D. / Xue, L.

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Preparation and characterization of pulsed laser deposition (PLD) SiC films

Tang, Y. H. / Sham, T. K. / Yang, D. / Xue, L.

Preparation and characterization of pulsed laser deposition (PLD) SiC films

Tang, Y. H. / Sham, T. K. / Yang, D. / Xue, L.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Preparation and characterization of pulsed laser deposition (PLD) SiC films

Contributors:

Tang, Y. H. (author) / Sham, T. K. (author) / Yang, D. (author) / Xue, L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 3386-3389

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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