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A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method

Zhang, H. J. / Qiu, C. J.

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A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method

Zhang, H. J. / Qiu, C. J.

A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method

Zhang, H. J. / Qiu, C. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A TiNiCu Thin Film Micropump Made by Magnetron Co-Sputtered Method

Contributors:

Zhang, H. J. (author) / Qiu, C. J. (author)

Published in:

MATERIALS TRANSACTIONS ; 47 ; 532-535

Publication date:

2006-01-01

Size:

4 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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