Investigation of SiO2/Si3N4 films prepared on sapphire by r.f. magnetron reactive sputtering: Fid-Bau Portal

Investigation of SiO2/Si3N4 films prepared on sapphire by r.f. magnetron reactive sputtering

Feng, L. / Liu, Z. / Li, Q. / Song, W.

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Investigation of SiO2/Si3N4 films prepared on sapphire by r.f. magnetron reactive sputtering

Feng, L. / Liu, Z. / Li, Q. / Song, W.

Investigation of SiO2/Si3N4 films prepared on sapphire by r.f. magnetron reactive sputtering

Feng, L. / Liu, Z. / Li, Q. / Song, W.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Investigation of SiO2/Si3N4 films prepared on sapphire by r.f. magnetron reactive sputtering

Contributors:

Feng, L. (author) / Liu, Z. (author) / Li, Q. (author) / Song, W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 4064-4070

Publication date:

2006-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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