Comparing study of subpicosecond and nanosecond wet etching of fused silica: Fid-Bau Portal

Comparing study of subpicosecond and nanosecond wet etching of fused silica

Vass, C. / Sebk, D. / Hopp, B.

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Comparing study of subpicosecond and nanosecond wet etching of fused silica

Vass, C. / Sebk, D. / Hopp, B.

Comparing study of subpicosecond and nanosecond wet etching of fused silica

Vass, C. / Sebk, D. / Hopp, B.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Comparing study of subpicosecond and nanosecond wet etching of fused silica

Contributors:

Vass, C. (author) / Sebk, D. (author) / Hopp, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 4768-4772

Publication date:

2006-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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