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Microfabrication in free-standing gallium nitride using UV laser micromachining
Microfabrication in free-standing gallium nitride using UV laser micromachining
Microfabrication in free-standing gallium nitride using UV laser micromachining
Gu, E. (author) / Howard, H. (author) / Conneely, A. (author) / O'Connor, G. M. (author) / Illy, E. K. (author) / Knowles, M. R. (author) / Edwards, P. R. (author) / Martin, R. W. (author) / Watson, I. M. (author) / Dawson, M. D. (author)
APPLIED SURFACE SCIENCE ; 252 ; 4897-4901
2006-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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