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Laser micromachining of free-standing structures in SiO~2-covered silicon

Allard, M. / Boughaba, S. / Meunier, M.

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Laser micromachining of free-standing structures in SiO~2-covered silicon

Allard, M. / Boughaba, S. / Meunier, M.

Laser micromachining of free-standing structures in SiO~2-covered silicon

Allard, M. / Boughaba, S. / Meunier, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Laser micromachining of free-standing structures in SiO~2-covered silicon

Contributors:

Allard, M. (author) / Boughaba, S. (author) / Meunier, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 109/110 ; 189-193

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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