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Influence of the deposition pressure on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering
Influence of the deposition pressure on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering
Influence of the deposition pressure on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering
APPLIED SURFACE SCIENCE ; 252 ; 5687-5692
2006-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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