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Diffusion behavior of implanted Li ions in GaN thin films studied by secondary ion mass spectrometry
Diffusion behavior of implanted Li ions in GaN thin films studied by secondary ion mass spectrometry
Diffusion behavior of implanted Li ions in GaN thin films studied by secondary ion mass spectrometry
Salman, F. (author) / Chow, L. (author) / Chai, B. (author) / Stevie, F. A. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 375-379
2006-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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