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Determination of energy dependent ionization probabilities of sputtered particles

Mazarov, P. / Samartsev, A. V. / Wucher, A.

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Determination of energy dependent ionization probabilities of sputtered particles

Mazarov, P. / Samartsev, A. V. / Wucher, A.

Determination of energy dependent ionization probabilities of sputtered particles

Mazarov, P. / Samartsev, A. V. / Wucher, A.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Determination of energy dependent ionization probabilities of sputtered particles

Contributors:

Mazarov, P. (author) / Samartsev, A. V. (author) / Wucher, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 6452-6455

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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