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Probability of ionization of sputtered particles as a function of their energy:Part I: Negative Si- ions
Probability of ionization of sputtered particles as a function of their energy:Part I: Negative Si- ions
Probability of ionization of sputtered particles as a function of their energy:Part I: Negative Si- ions
Kudriavtsev, Y. (author) / Villegas, A. (author) / Gallardo, S. (author) / Asomoza, R. (author)
APPLIED SURFACE SCIENCE ; 254 ; 2059-2066
2008-01-01
8 pages
Article (Journal)
English
DDC:
621.35
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