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Microstructure of epitaxial scandium nitride films grown on silicon

Moram, M. A. / Joyce, T. B. / Chalker, P. R. / Barber, Z. H. / Humphreys, C. J.

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Microstructure of epitaxial scandium nitride films grown on silicon

Moram, M. A. / Joyce, T. B. / Chalker, P. R. / Barber, Z. H. / Humphreys, C. J.

Microstructure of epitaxial scandium nitride films grown on silicon

Moram, M. A. / Joyce, T. B. / Chalker, P. R. / Barber, Z. H. / Humphreys, C. J.

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Check availability in my library

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Document information

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Document information

Title:

Microstructure of epitaxial scandium nitride films grown on silicon

Contributors:

Moram, M. A. (author) / Joyce, T. B. (author) / Chalker, P. R. (author) / Barber, Z. H. (author) / Humphreys, C. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 8385-8387

Publication date:

2006-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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