Epitaxial aluminium nitride on patterned silicon: Fid-Bau Portal

Epitaxial aluminium nitride on patterned silicon

Moreno, J. C. / Frayssinet, E. / Semond, F. / Placidi, M. / Godignon, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Epitaxial aluminium nitride on patterned silicon

Moreno, J. C. / Frayssinet, E. / Semond, F. / Placidi, M. / Godignon, P.

Epitaxial aluminium nitride on patterned silicon

Moreno, J. C. / Frayssinet, E. / Semond, F. / Placidi, M. / Godignon, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Epitaxial aluminium nitride on patterned silicon

Contributors:

Moreno, J. C. (author) / Frayssinet, E. (author) / Semond, F. (author) / Placidi, M. (author) / Godignon, P. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 12 ; 31-33

Publication date:

2009-01-01

Size:

3 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Avrov, D. D. / Dorozhkin, S. I. / Lebedev, A. O. et al. | British Library Online Contents | 2000

Epitaxial growth of asymmetric -silicon nitride nanocombs

Wang, Q. / Cui, Q. / Zhu, P. et al. | British Library Online Contents | 2010

Low Temperature Selective and Lateral Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates

Jacob, C. / Pirouz, P. / Nishino, S. | British Library Online Contents | 2001

Selective Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates Using Hexachlorodisilane and Propane

Jacob, C. / Hong, M.-H. / Chung, J. et al. | British Library Online Contents | 2000

Microstructure of epitaxial scandium nitride films grown on silicon

Moram, M. A. / Joyce, T. B. / Chalker, P. R. et al. | British Library Online Contents | 2006