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Physics of process induced uniaxially strained Si

Sun, Y. / Sun, G. / Parthasarathy, S. / Thompson, S. E.

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Physics of process induced uniaxially strained Si

Sun, Y. / Sun, G. / Parthasarathy, S. / Thompson, S. E.

Physics of process induced uniaxially strained Si

Sun, Y. / Sun, G. / Parthasarathy, S. / Thompson, S. E.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Physics of process induced uniaxially strained Si

Contributors:

Sun, Y. (author) / Sun, G. (author) / Parthasarathy, S. (author) / Thompson, S. E. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 135 ; 179-183

Publication date:

2006-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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