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Studies on Selective Growth and In Situ Etching of 4H-SiC Using a TaC Mask
Studies on Selective Growth and In Situ Etching of 4H-SiC Using a TaC Mask
Studies on Selective Growth and In Situ Etching of 4H-SiC Using a TaC Mask
Li, C. H. (author) / Bhat, I. B. (author) / Chow, T. P. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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