Formation of black silicon using SiGe self-assembled islands as a mask for selective anisotropic etching of silicon: Fid-Bau Portal

Formation of black silicon using SiGe self-assembled islands as a mask for selective anisotropic etching of silicon

Yurasov, D.V. / Novikov, A.V. / Shaleev, M.V. / Baidakova, N.A. / Morozova, E.E. / Skorokhodov, E.V. / Ota, Y. / Hombe, A. / Kurokawa, Y. / Usami, N.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Formation of black silicon using SiGe self-assembled islands as a mask for selective anisotropic etching of silicon

Yurasov, D.V. / Novikov, A.V. / Shaleev, M.V. / Baidakova, N.A. / Morozova, E.E. / Skorokhodov, E.V. / Ota, Y. / Hombe, A. / Kurokawa, Y. / Usami, N.

Formation of black silicon using SiGe self-assembled islands as a mask for selective anisotropic etching of silicon

Yurasov, D.V. / Novikov, A.V. / Shaleev, M.V. / Baidakova, N.A. / Morozova, E.E. / Skorokhodov, E.V. / Ota, Y. / Hombe, A. / Kurokawa, Y. / Usami, N.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Formation of black silicon using SiGe self-assembled islands as a mask for selective anisotropic etching of silicon

Contributors:

Yurasov, D.V. (author) / Novikov, A.V. (author) / Shaleev, M.V. (author) / Baidakova, N.A. (author) / Morozova, E.E. (author) / Skorokhodov, E.V. (author) / Ota, Y. (author) / Hombe, A. (author) / Kurokawa, Y. (author) / Usami, N. (author)

Published in:

Materials science in semiconductor processing ; 75 ; 143-148

Publication date:

2018-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Yurasov, D.V. / Novikov, A.V. / Shaleev, M.V. et al. | British Library Online Contents | 2018

Black Silicon formation using dry etching for solar cells applications

Murias, D. / Reyes-Betanzo, C. / Moreno, M. et al. | British Library Online Contents | 2012

Ge self-assembled islands grown on SiGe/Si(001) relaxed buffer layers

Shaleev, M. V. / Novikov, A. V. / Kuznetsov, O. A. et al. | British Library Online Contents | 2005

Micromachined Multilevel Silicon Structure by Anisotropic Wet Etching

Chung, C.-K. | British Library Online Contents | 2002

Trenches around and between self assembled silicon/germanium islands grown on silicon substrates investigated by atomic force microscopy

Denker, U. / Dashiell, M. W. / Jin-Phillipp, N. Y. et al. | British Library Online Contents | 2002