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    SiC Substrate Doping Profiles Using Commercial Optical Scanners

    New search for: Caldwell, J. D.
    New search for: Glembocki, O. J.
    New search for: Hansen, D. M.
    New search for: Chung, G.
    New search for: Hobart, K. D.
    New search for: Kub, F. J.
    New search for: Devaty, R. P.
    New search for: Larkin, D. J.
    New search for: Saddow, S. E.

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    SiC Substrate Doping Profiles Using Commercial Optical Scanners

    New search for: Caldwell, J. D.
    New search for: Glembocki, O. J.
    New search for: Hansen, D. M.
    New search for: Chung, G.
    New search for: Hobart, K. D.
    New search for: Kub, F. J.
    New search for: Devaty, R. P.
    New search for: Larkin, D. J.
    New search for: Saddow, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    SiC Substrate Doping Profiles Using Commercial Optical Scanners

    New search for: Caldwell, J. D.
    New search for: Glembocki, O. J.
    New search for: Hansen, D. M.
    New search for: Chung, G.
    New search for: Hobart, K. D.
    New search for: Kub, F. J.
    New search for: Devaty, R. P.
    New search for: Larkin, D. J.
    New search for: Saddow, S. E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    SiC Substrate Doping Profiles Using Commercial Optical Scanners

    Contributors:

    Caldwell, J. D. (author) / Glembocki, O. J. (author) / Hansen, D. M. (author) / Chung, G. (author) / Hobart, K. D. (author) / Kub, F. J. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.

    Published in:

    Silicon Carbide and Related Materials - 2005 ; 725-728

    MATERIALS SCIENCE FORUM ; 527/529

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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